Nanopatterned Silicon Stamps
LightSmyth提供种类繁多的纳米制造单结晶硅基底,为纳米光子学研究行业和学术机构提供了一个低成本应用的方案。可用于各种应用在光学、光子学、生物学、化学、物理学(如中子散射)、高分子材料研究、纳米、微流体和其他的基板。如果需要的话,可以在基板进行金属或介电材料镀膜。大多数截面型材的表面特征略呈梯形,有直线平行的台地和沟槽以及格状结构。可提供多种特征尺寸和沟槽深度。基板的SEM图像,可以在装运之前进行更新的确认。
新的纳米标记现货会不断地增加。如果在产品列表中找不到需要的纳米结构产品,敬请致电亚太区的销售代表,他会帮您联系我们的科学家。
订货须知:价格如有变更,恕不另行通知。订单总价格将包括装卸和运输费用。产品总价低于$250.00的订单,手续费增加$75.00添,其他情况手续费为5.00美元。航运选项和定价,请参阅订购表格http://www.lightsmyth.com/downloads/ordering/order_form.pdf。
表中所示的尺寸为目标值。凹槽的深度和线宽和空间与目标值有15%范围内的差别时,周期精度将优于0.5%。给出的 SEM仅用于演示说明。如需更精确的尺寸信息,可在订单中勾选提供指定纳米标记的SEM的服务。
批量折扣
订单金额超过$1000的折扣15%,订单超过$2000元的折扣20%(不包括运费和手续费)。
新品
所有现货均可定制更深沟槽深度。详情请联络我们亚太区销售代表。
规格
Description |
Value |
Substrate Width and Height Tolerance |
standard tolerance ± 0.2 mm |
Clear Aperture (CA) |
0.5 mm from substrate edge (the pattern may extend to the edge of the substrate) |
Substrate Thickness |
0.675 ± 0.050 mm |
Surface Quality in CA |
P/N ends with "-P": 60/40 scratch/dig: 0.06 mm maximum scratch width, 0.4 mm maximum dig diameter. up to 20/10 specification may be provided at a premium |
Surface Quality in CA |
P/N ends with "-S": Discounted grade due to surface quality. Has at least 80% of usable area. Up to 80/100 scratch/dig/particles and irregular substrate shape may present |
Surface Quality outside of CA |
no requirements |
Material |
Single crystal silicon, reactive ion etch |
线性纳米标记 (行+空间)
Period |
Groove depth |
Duty cycle 1 |
Line width 2 |
Size 3 |
Part number |
Price |
SEM link1 |
SEM link2 |
139 nm |
50 nm |
50% |
69.5 nm |
12.5×12.5×0.7 mm |
SNS-C72-1212-50-P |
$290.00 ea. |
X-sec |
Top down |
139 nm |
50 nm |
50% |
69.5 nm |
25×25×0.7 mm 5 |
SNS-C72-2525-50-P |
$470.00 ea. |
X-sec |
Top down |
278 nm |
110 nm |
50% |
139 nm |
12.5×12.5×0.7 mm |
SNS-C36-1212-110-S 4 |
$95.00 ea. |
X-sec |
Top down |
416.6 nm |
110 nm |
50% |
208 nm |
12.5×12.5×0.7 mm |
SNS-C24-1212-110-P |
$185.00 ea. |
X-sec |
Top down |
500 nm |
multiple6 |
44% |
220 nm |
8×8.3×0.7 mm |
SNS-C20-0808-xxx-D45-P |
$185.00 ea. |
|
Top down |
500 nm |
multiple6 |
60% |
300 nm |
8×8.3×0.7 mm |
SNS-C20-0808-xxx-D60-P |
$185.00 ea. |
|
Top down |
555.5 nm |
110 nm |
50% |
278 nm |
20×9×0.7 mm |
SNS-C18-2009-110-D50-P |
$185.00 ea. |
X-sec |
Top down |
555.5 nm |
140 nm |
50% |
278 nm |
20×9×0.7 mm |
SNS-C18-2009-140-D50-P |
$185.00 ea. |
X-sec |
Top down |
555.5 nm |
110 nm |
29% |
158 nm |
20×9×0.7 mm |
SNS-C18-2009-110-D29-P |
$185.00 ea. |
X-sec |
Top down |
555.5 nm |
140 nm |
29% |
158 nm |
20×9×0.7 mm |
SNS-C18-2009-140-D29-P |
$185.00 ea. |
X-sec |
Top down |
600 nm |
multiple6 |
43% |
260 nm |
8×8.3×0.7 mm |
SNS-C16.7-0808-xxx-D45-P |
$185.00 ea. |
|
Top down |
600 nm |
multiple6 |
55% |
330 nm |
8×8.3×0.7 mm |
SNS-C16.7-0808-xxx-D55-P |
$185.00 ea. |
|
Top down |
606 nm |
190 nm |
50% |
303 nm |
29×12×0.7 mm |
SNS-C16.5-2912-190-P |
$245.00 ea. |
X-sec |
Top down |
606 nm |
190 nm |
50% |
303 nm |
29×12×0.7 mm |
SNS-C16.5-2912-190-S 4 |
$90.00 ea. |
X-sec |
Top down |
606 nm |
190 nm |
50% |
303 nm |
29×24.2×0.7 mm5 |
SNS-C16.5-2924-190-P |
$380.00 ea. |
X-sec |
Top down |
675 nm |
170 nm |
32% |
218 nm |
24×10×0.7 mm |
SNS-C14.8-2410-170-P |
$245.00 ea. |
|
|
675 nm |
170 nm |
32% |
218 nm |
24×30.4×0.7 mm5 |
SNS-C14.8-2430-170-P |
$380.00 ea. |
|
|
700 nm |
multiple6 |
47% |
330 nm |
8×8.3×0.7 mm |
SNS-C14.3-0808-xxx-D45-P |
$185.00 ea. |
|
Top down |
700 nm |
multiple6 |
55% |
375 nm |
8×8.3×0.7 mm |
SNS-C14.3-0808-xxx-D55-P |
$185.00 ea. |
|
Top down |
833.3 nm |
200 nm |
50% |
416 nm |
12.5×12.5×0.7 mm |
SNS-C12-1212-200-P |
$185.00 ea. |
X-sec |
Top down |
833.3 nm |
200 nm |
50% |
416 nm |
25×25×0.7 mm 5 |
SNS-C12-2525-200-P |
$380.00 ea. |
X-sec |
Top down |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1 Duty cycle denotes ratio of line (mesa) width over period. |
|
|
2 Indicates width value of mesa. |
|
|
3 Second dimension corresponds to the groove length. |
|
|
4 P/N ending with "-S" is "scientific" grade offered at a discount. It has at least 80% of usable area. Up to 80/100 scratch/dig/particles and irregular substrate shape may present. |
|
|
5 Larger custom sizes available-please call |
|
|
6 Depth options of 150, 250 and 350 nm available. To order a particular depth, replace "xxx" in the part number with "150", "250", or "350", respectively. |
|
|
2D纳米标记(矩形和六边形格)
Period |
Lattice type |
Groove depth |
Feature width |
Size |
Part number |
Price |
SEM link1 |
SEM link2 |
500 nm |
rect post |
multiple 1 |
135 nm |
8×8.3×0.7 mm |
S2D-24B1-0808-xxx-P |
$185.00 ea. |
Top down |
|
500 nm |
rect post |
multiple 1 |
210 nm |
8×8.3×0.7mm |
S2D-18B1-0808-xxx-P |
$185.00 ea. |
Top down |
|
600 nm |
rect post |
multiple 1 |
195 nm |
8×8.3×0.7mm |
S2D-24B2-0808-xxx-P |
$185.00 ea. |
Top down |
|
600 nm |
rect post |
multiple 1 |
275 nm |
8×8.3×0.7mm |
S2D-18B2-0808-xxx-P |
$185.00 ea. |
Top down |
|
700 nm |
rect post |
multiple 1 |
260 nm |
8×8.3×0.7mm |
S2D-24B3-0808-xxx-P |
$185.00 ea. |
Top down |
|
700 nm |
rect post |
multiple 1 |
350 nm |
8×8.3×0.7mm |
S2D-18B3-0808-xxx-P |
$185.00 ea. |
Top down |
|
500 nm |
hex post |
multiple 1 |
165 nm |
8×8.3×0.7mm |
S2D-18C1-0808-xxx-P |
$185.00 ea. |
Top down |
|
600 nm |
hex post |
multiple 1 |
165 nm |
8×8.3×0.7mm |
S2D-24C2-0808-xxx-P |
$185.00 ea. |
Top down |
|
600 nm |
hex post |
multiple 1 |
240 nm |
8×8.3×0.7mm |
S2D-18C2-0808-xxx-P |
$185.00 ea. |
Top down |
|
700 nm |
hex post |
multiple 1 |
220 nm |
8×8.3×0.7mm |
S2D-24C3-0808-xxx-P |
$185.00 ea. |
Top down |
|
700 nm |
hex post |
multiple 1 |
290 nm |
8×8.3×0.7mm |
S2D-18C3-0808-xxx-P |
$185.00 ea. |
Top down |
|
600 nm |
hex hole |
multiple 1 |
180 nm |
8×8.3×0.7mm |
S2D-24D2-0808-xxx-P |
$185.00 ea. |
Top down |
|
700 nm |
hex hole |
multiple 1 |
200 nm |
8×8.3×0.7mm |
S2D-18D3-0808-xxx-P |
$185.00 ea. |
Top down |
|
700 nm |
hex hole |
multiple 1 |
290 nm |
8×8.3×0.7mm |
S2D-24D3-0808-xxx-P |
$185.00 ea. |
Top down |
|
|
|
|
1 Depth options of 150, 250 and limited selection of 350 nm available. To order a particular depth, replace "xxx" in the part number with "150", "250", or "350", respectively. |
|
|